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Analysis of the interface trap density in SOI FinFETs with different TiN gate electrode thickness through charge pumping technique
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Analysis of the interface trap density in SOI FinFETs with different TiN gate electrode thickness through charge pumping technique
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Date
2009-09
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rodrigues, Michele
;
Cho, Moon Ju
;
Martino, J.A.
;
Collaert, Nadine
;
Mercha, Abdelkarim
;
Simoen, Eddy
;
Claeys, Cor
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1885
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Acq. date: 2025-12-10
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Metrics
Views
1885
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-10
Citations