Authors

Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, P.

Conference

Belgische Natuurkundige Vereniging. Algemene Wetenschappelijke Vergadering

Title

Correlation between grown-in silicon substrate defects and silicon gate oxide breakdown characteristics

Publication type

Meeting abstract

Embargo date

9999-12-31