Authors

Sangameswaran, Sandeep; De Coster, Jeroen; Scholz, Mirko; Linten, Dimitri; Thijs, Steven; Van Hoof, Chris; De Wolf, Ingrid; Groeseneken, Guido

Conference

31st Annual EOS/ESD Symposium

Title

A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress

Publication type

Proceedings paper

Embargo date

9999-12-31