Selective removal of high-k dielectrics

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Authors

Shamiryan, Denis; Baklanov, Mikhaïl; Claes, Martine; Boullart, Werner; Paraschiv, Vasile

ISSN

0098-6445

Journal

Chemical Engineering Communications

Volume

196

Title

Selective removal of high-k dielectrics

Publication type

Journal article

Embargo date

9999-12-31

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