Authors

Urbanowicz, Adam; Talanov, Vladimir; Pantouvaki, Marianna; Struyf, Herbert; De Gendt, Stefan; Baklanov, Mikhaïl

Conference

IEEE International Interconnect Technology Conference - IITC

Title

Evaluation of plasma damage in patterned low-k structures by near-field scanning probe microwave microscope: effect of plasma ash chemistry

Publication type

Proceedings paper