Publication:
Evaluation of plasma damage in patterned low-k structures by near-field scanning probe microwave microscope: effect of plasma ash chemistry
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1866 since deposited on 2021-10-18
2last month
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Acq. date: 2026-02-27
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Statistics
Views
1866 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-02-27
Citations