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3D stacked IC demonstrator using hybrid collective die-to-wafer bonding with copper through silicon vias (TSV)

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2037 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2025-12-08

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2037 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2025-12-08

Citations