Publication:
High-k/ metal-gate stack work-function tuning by rare-earth capping layers: interface dipole or bulk charge?
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1868 since deposited on 2021-10-18
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Acq. date: 2026-01-11
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1868 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-01-11
Citations