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Defect profiling in the SiO2/Al2O3 interface using variable Tcharge-Tdischarge amplitude charge pumping (VT2ACP)
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Authors
Zahid, Mohammed
;
Degraeve, Robin
;
Cho, Moon Ju
;
Pantisano, Luigi
;
Van Houdt, Jan
;
Groeseneken, Guido
;
Jurczak, Gosia
;
Ruiz Aguado, Daniel
Conference
47th Annual IEEE International Reliability Physics Symposium - IRPS
Title
Defect profiling in the SiO2/Al2O3 interface using variable Tcharge-Tdischarge amplitude charge pumping (VT2ACP)
Publication type
Proceedings paper
Embargo date
9999-12-31
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