Authors

Zheng, X.F.; Zhang, W.D.; Govoreanu, Bogdan; Zhang, J.F.; Van Houdt, Jan

ISSN

0167-9317

Issue

7_9

Journal

Microelectronic Engineering

Volume

86

Title

Impact of PDA temperature on electron trap energy and spatial distributions in SiO2/Al2O3 stack as the IPD in Flash memory cells

Publication type

Journal article

Embargo date

9999-12-31