Atomic layer deposition of Gd-doped HfO2 thin films

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Authors

Adelmann, Christoph; Tielens, Hilde; Dewulf, Daan; Hardy, An; Pierreux, Dieter; Swerts, Johan; Rosseel, Erik; Shi, Xiaoping; Van Bael, Marlies; Kittl, Jorge; Van Elshocht, Sven

ISSN

0013-4651

Issue

4

Journal

Journal of the Electrochemical Society

Volume

157

Title

Atomic layer deposition of Gd-doped HfO2 thin films

Publication type

Journal article

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