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InGaAs channel IFQW-MOSFET: Effect of InAlAs interfacial passivation layer and (NH4)2S treatment on the electrical behavior
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Authors
Alian, AliReza
;
Merckling, Clement
;
Brammertz, Guy
;
Meuris, Marc
;
De Meyer, Kristin
;
Heyns, Marc
;
Hoffmann, Thomas Y.
Conference
41st IEEE Semiconductor Interface Specialists Conference - SISC
Title
InGaAs channel IFQW-MOSFET: Effect of InAlAs interfacial passivation layer and (NH4)2S treatment on the electrical behavior
Publication type
Proceedings paper
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