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Investigation on the temperature dependence of the dielectric constant of high-k materials for non-volatile memory applications
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Authors
Arreghini, Antonio
;
Suhane, Amit
;
Van den Bosch, Geert
;
Breuil, Laurent
;
De Meyer, Kristin
;
Jurczak, Gosia
;
Van Houdt, Jan
Conference
11th International Conference on Ultimate Integration on Silicon - ULIS
Title
Investigation on the temperature dependence of the dielectric constant of high-k materials for non-volatile memory applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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