Stress analysis ad junction leakage of sub-melt laser annealed SiGe epitacial layers

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Authors

Bargallo Gonzalez, Mireia; Rosseel, Erik; Hikavyy, Andriy; Fernandez Lanas, Tatiana; Eneman, Geert; Verheyen, Peter; Loo, Roger; Simoen, Eddy; Claeys, Cor

ISSN

0894-6507

Issue

4

Journal

IEEE Transactions on Semiconductor Manufacturing

Volume

23

Title

Stress analysis ad junction leakage of sub-melt laser annealed SiGe epitacial layers

Publication type

Journal article

Embargo date

9999-12-31

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