Publication:
Metallization options for sub- 30 nm interconnects: comparison of Cu and W metallizations
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1969 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-02-25
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Statistics
Views
1969 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-02-25
Citations