Publication:
Metallization options for sub- 30 nm interconnects: comparison of Cu and W metallizations
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1971 since deposited on 2021-10-18
3last month
2last week
Acq. date: 2026-03-17
Citations
Statistics
Views
1971 since deposited on 2021-10-18
3last month
2last week
Acq. date: 2026-03-17
Citations