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Compressive stress relaxation in Si-doped GaN grown on Si(111) investigated by in situ curvature measurement
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Authors
Cheng, Kai
;
Leys, Maarten
;
Dekoster, Johan
;
Degroote, Stefan
Conference
International Workshop on Nitride Semiconductors - IWN
Title
Compressive stress relaxation in Si-doped GaN grown on Si(111) investigated by in situ curvature measurement
Publication type
Oral presentation
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