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Patterning of 25nm contact holes at 90nm pitch: combination of L/S double exposure immersion lithography and plasma-assisted shrink technology
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1876 since deposited on 2021-10-18
1last month
Acq. date: 2026-05-17
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Statistics
Views
1876 since deposited on 2021-10-18
1last month
Acq. date: 2026-05-17
Citations