Publication:
Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channel materials
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1858 since deposited on 2021-10-18
2last month
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Acq. date: 2026-02-27
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Statistics
Views
1858 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-02-27
Citations