Authors

Delabie, Annelies; Sioncke, Sonja; Van Elshocht, Sven; Caymax, Matty; Pourtois, Geoffrey; Pierloot, Kristine

Conference

Atomic Layer Deposition Applications 6

Title

Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channel materials

Publication type

Proceedings paper