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CMOS compatible anodization process for low cost high density capacitors
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Authors
Detalle, Mikael
;
Rakowski, Michal
;
Potoms, Goedele
;
Mercha, Abdelkarim
;
de Potter de ten Broeck, Muriel
;
Phommahaxay, Alain
;
Sabuncuoglu Tezcan, Deniz
;
Soussan, Philippe
Conference
Processing, Materials, and Integration of Damascene and 3D Interconnects
Title
CMOS compatible anodization process for low cost high density capacitors
Publication type
Proceedings paper
Embargo date
9999-12-31
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