Challenges in setting up the patterning processes for a 16nm node SRAM cell

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Authors
Ercken, Monique; Vandeweyer, Tom; Versluijs, Janko; Truffert, Vincent; De Backer, Johan; Delvaux, Christie; Baerts, Christina
Conference
Fujifilm Advanced Lithography Workshop
Title
Challenges in setting up the patterning processes for a 16nm node SRAM cell
Publication type
Oral presentation
Embargo date
9999-12-31
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