Publication:

Challenges in setting up the patterning processes for a 16nm node SRAM cell

Date

2010
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21561.pdf 7.23 MB

Author(s)

Ercken, Monique  
;
Vandeweyer, Tom  
;
Versluijs, Janko  
;
Truffert, Vincent  
;
De Backer, Johan  
;
Delvaux, Christie  
;
Baerts, Christina  

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