Publication:
Challenges in setting up the patterning processes for a 16nm node SRAM cell
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1972 since deposited on 2021-10-18
9last month
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Acq. date: 2026-08-05
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Statistics
Views
1972 since deposited on 2021-10-18
9last month
3last week
Acq. date: 2026-08-05
Citations