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Contactless mobility measurements of inversion charge carriers on silicon substrates with SiO2 and HfO2 gate dielectrics
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Authors
Everaert, Jean-Luc
;
Rosseel, Erik
;
Dekoster, Johan
;
Pap, Aron
;
Maszaros, Albert
;
Kis-Szabo, Krisztian
;
Pavelka, Tibor
ISSN
0003-6951
Issue
12
Journal
Applied Physics Letters
Volume
96
Title
Contactless mobility measurements of inversion charge carriers on silicon substrates with SiO2 and HfO2 gate dielectrics
Publication type
Journal article
Embargo date
9999-12-31
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