Impact of top-surface tunnel-oxide nitridation on flash memory performance and reliability

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Authors

Ganguly, Udayan; Guarini, Theresa; Wellekens, Dirk; Date, Lucien; Cho, Yonah; Rothschild, Aude; Swenberg, Johanes

ISSN

0741-3106

Issue

2

Journal

IEEE Electron Device Letters

Volume

31

Title

Impact of top-surface tunnel-oxide nitridation on flash memory performance and reliability

Publication type

Journal article

Embargo date

9999-12-31

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