field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing

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Authors
Gilbert, Matthieu; Koelling, Sebastian; Kambham, Ajay Kumar; Vandervorst, Wilfried
Conference
52nd International Field Emission Symposium - IFES
Title
field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing
Publication type
Oral presentation
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