Authors

Guo, Bin; Severi, Simone; Bryce, George; Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Haspeslagh, Luc; Witvrouw, Ann; Decoutere, Stefaan

ISSN

0013-4651

Issue

2

Journal

Journal of the Electrochemical Society

Volume

157

Title

Improvement of PECVD silicon–germanium crystallization for CMOS compatible MEMS applications

Publication type

Journal article

Embargo date

9999-12-31