Authors

Menou, Nicolas; Popovici, Mihaela Ioana; Opsomer, Karl; Kaczer, Ben; Pawlak, Malgorzata; Adelmann, Christoph; Franquet, Alexis; Favia, Paola; Bender, Hugo; Detavernier, Christophe; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge

ISSN

0021-4922

Issue

4

Journal

Japanese Journal of Applied Physics

Volume

49

Title

Seed layer and multistack approaches to reduce leakage in SrTiO3-based metal-insulator-metal capacitors using TiN bottom electrode

Publication type

Journal article

Embargo date

9999-12-31