Publication:

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Date

2010
Journal article
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19604.pdf 4.78 MB

Author(s)

Mody, Jay
;
Duffy, Ray
;
Eyben, Pierre  
;
Goossens, Jozefien
;
Moussa, Alain  
;
Polspoel, Wouter
;
Berghmans, Bart
;
Van Dal, Mark  
;
Pawlak, Bartek  
;
Kaiser, Monja
;
Weemaes, R. G. R.
;
Vandervorst, Wilfried  

Journal

Journal of Vacuum Science and Technology B

Abstract

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2002 since deposited on 2021-10-18
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