Authors

Nguyen, M.D.; Nazeer, H.; Karakaya, Koray; Pham, S.V.; Steenwelle, R.; Dekkers, M.; Abelmann, L.; Blank, M.; Rijnders, G.

ISSN

0960-1317

Issue

8

Journal

Journal of Micromechanics and Microengineering

Volume

20

Title

Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers

Publication type

Journal article