Authors

Norris, D.J.; Walther, T.; Cullis, A.G.; Myronov, M.; Dobbie, A.; Whall, T.; Parker, E.H.C.; Leadley, D.R.; De Jaeger, Brice; Lee, Willie; Meuris, Marc; Watling, J.; Asenov, A.

ISSN

1742-6588

Issue

1

Journal

Journal of Physics Conference Series

Volume

209

Title

TEM analysis of Ge-on-Si MOSFET structures with HfO2 dielectric for high performance PMOS device technology

Publication type

Journal article

Embargo date

9999-12-31