Authors

O'Connor, Robert; Kauerauf, Thomas; Ragnarsson, Lars-Ake; Hughes, Greg

Conference

48th Annual International Reliability Physics Symposium - IRPS

Title

Time dependent dielectric breakdown and stress induced leakage current characteristics of 8 Å EOT HfO2 n-MOSFETs

Publication type

Proceedings paper

Embargo date

9999-12-31