Authors

Okoro, Chukwudi; Vanstreels, Kris; Labie, Riet; Luhn, Ole; Vandevelde, Bart; Verlinden, Bert; Vandepitte, Dirk

ISSN

0960-1317

Issue

4

Journal

Journal of Micromechanics and Microengineering

Volume

20

Title

Influence of annealing conditions on the mechanical and microstructural behavior of electroplated Cu-TSV

Publication type

Journal article