Authors

Czerwinski, A.; Simoen, Eddy; Vanhellemont, Jan; Tomaszewski, D.; Gibki, J.; Bakowski, A.

Conference

Proceedings of the 7th International Autumn Meeting : Gettering and Defect Engineering in Semiconductor Technology - GADEST '97

Title

Improved extraction of Si substrate parameters from combined I-V and C-V measurements on P-N junction diodes

Publication type

Proceedings paper

Embargo date

9999-12-31