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Low-frequency noise and static analysis of the impact of the TiN metal gate thicknesses on n- and p- channel MuGFETs
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Authors
Rodrigues, M.
;
Martino, J.A.
;
Mercha, Abdelkarim
;
Collaert, Nadine
;
Simoen, Eddy
;
Claeys, Cor
ISSN
0038-1101
Issue
12
Journal
Solid-State Electronics
Volume
54
Title
Low-frequency noise and static analysis of the impact of the TiN metal gate thicknesses on n- and p- channel MuGFETs
Publication type
Journal article
Embargo date
9999-12-31
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