Investigating ESD sensitivity in electrostatic SiGe MEMS

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Authors

Sangameswaran, Sandeep; De Coster, Jeroen; Linten, Dimitri; Scholz, Mirko; Thijs, Steven; Groeseneken, Guido; De Wolf, Ingrid

ISSN

0960-1317

Issue

5

Journal

Journal of Micromechanics and Microengineering

Volume

20

Title

Investigating ESD sensitivity in electrostatic SiGe MEMS

Publication type

Journal article

Embargo date

9999-12-31

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