Authors

Sygellou, L; Ladas, S; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan

ISSN

0142-2421

Issue

42

Journal

Surface and Interface Analysis

Volume

2010

Title

A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

Publication type

Journal article

Embargo date

9999-12-31