ESD evaluation of 3D SIC technology using TSV

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Authors
Thijs, Steven; Linten, Dimitri; Scholz, Mirko; Mercha, Abdelkarim; Van der Plas, Geert; Travaly, Youssef; Van Olmen, Jan; Groeseneken, Guido
Conference
International ESD Workshop - IEW
Title
ESD evaluation of 3D SIC technology using TSV
Publication type
Oral presentation
Embargo date
9999-12-31
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