Authors

Toledano Luque, Maria; Kaczer, Ben; Roussel, Philippe; Degraeve, Robin; Franco, Jacopo; Kauerauf, Thomas; Grasser, Tibor; Groeseneken, Guido

Conference

41st IEEE Semiconductor Interface Specialists Conference

Title

Vertical localization of trapped holes in SiON pMOSFETs after positive and negative gate stress

Publication type

Proceedings paper