Authors

Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; Cremel, Maxime; De Gendt, Stefan; Baklanov, Mikhaïl

Conference

Advanced Metallization Confererce 2009 - AMC 2009

Title

Fabrication of porogen residue free ultra low-k PECVD material by subsequent H2-afterglow plasma treatment and UV curing

Publication type

Proceedings paper