Apparent and steady-state etch rates in thin film etching and underetching of microstructures. I: Modeling

Publication:

2010

Journal article

Author(s)

;

;

;

Journal of Micromechanics and Microengineering

1900 since deposited on 2021-10-18

2last month

1last week

Acq. date: 2026-02-25