Publication:

Immersion lithography and double patterning in advanced microelectronics

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

20511.pdf 5.4 MB

Author(s)

Vandeweyer, Tom  
;
Bekaert, Joost  
;
Ercken, Monique  
;
Gronheid, Roel  
;
Miller, Andy  
;
Truffert, Vincent  
;
Verhaegen, Staf
;
Versluijs, Janko  
;
Wiaux, Vincent  
;
Wong, Patrick  
;
Vandenberghe, Geert  
;
Maenhoudt, Mireille

Journal

Abstract

Description

Statistics

Views

1953 since deposited on 2021-10-18
2last month
Acq. date: 2026-02-25

Citations

Statistics

Views

1953 since deposited on 2021-10-18
2last month
Acq. date: 2026-02-25

Citations