Immersion lithography and double patterning in advanced microelectronics

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Authors
Vandeweyer, Tom; Bekaert, Joost; Ercken, Monique; Gronheid, Roel; Miller, Andy; Truffert, Vincent; Verhaegen, Staf; Versluijs, Janko; Wiaux, Vincent; Wong, Patrick; Vandenberghe, Geert; Maenhoudt, Mireille
Conference
International Conference on Micro- and Nano Electronics 2009
Title
Immersion lithography and double patterning in advanced microelectronics
Publication type
Proceedings paper
Embargo date
9999-12-31
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