Publication:
FinFETs junctions optimization by conventional ion implantation for (sub-)22nm technology nodes circuit applications
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1787 since deposited on 2021-10-18
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Acq. date: 2026-03-17
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Statistics
Views
1787 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-03-17
Citations