Publication:

Multiple patterning: step by step towards 1X nm hp

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

20870.pdf 8.66 MB

Author(s)

Wiaux, Vincent  
;
Wong, Patrick  
;
Vandenbroeck, Nadia  
;
Bekaert, Joost  
;
Laenens, Bart
;
De Bisschop, Peter  
;
Versluijs, Janko  
;
Vandenberghe, Geert  

Journal

Abstract

Description

Statistics

Views

1961 since deposited on 2021-10-19
3last month
Acq. date: 2026-08-11

Citations

Statistics

Views

1961 since deposited on 2021-10-19
3last month
Acq. date: 2026-08-11

Citations