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Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)
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Authors
Afanasiev, Valeri
;
Keunen, K.
;
Stesmans, Andre
;
Jivanescu, M.
;
Tokei, Zsolt
;
Baklanov, Mikhaïl
;
Beyer, Gerald
ISSN
0167-9317
Issue
7
Journal
Microelectronic Engineering
Volume
88
Title
Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)
Publication type
Journal article
Embargo date
9999-12-31
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