Authors

Cacciato, Antonio; Breuil, Laurent; Dekkers, Harold; Zahid, Mohammed; Kar, Gouri Sankar; Everaert, Jean-Luc; Schoofs, Geert; Shi, Qixian; Van den Bosch, Geert; Jurczak, Gosia; Debusschere, Ingrid; Van Houdt, Jan; Cockburn, Andrew; Date, Lucien; Xa, Li Qun; Le, Maggie; Lee, Won

ISSN

1099-0062

Issue

7

Journal

Electrochemical and Solid-State Letters

Volume

14

Title

A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology

Publication type

Journal article

Embargo date

9999-12-31