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Probing the metal gate high-k interactions by backside XPS and C-AFM
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Acq. date: 2026-05-17
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Acq. date: 2026-05-17
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5 since deposited on 2021-10-19
Acq. date: 2026-05-17
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1875 since deposited on 2021-10-19
1last month
Acq. date: 2026-05-17
Citations