Probing the metal gate high-k interactions by backside XPS and C-AFM

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Authors
Celano, Umberto; Conard, Thierry; Hantschel, Thomas; Vandervorst, Wilfried
Conference
Interface Engineering for Post-CMOS Emerging Channel Materials
Title
Probing the metal gate high-k interactions by backside XPS and C-AFM
Publication type
Proceedings paper
Embargo date
9999-12-31
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