Authors

Chu, L.K.; Merckling, Clement; Alian, AliReza; Dekoster, Johan; Kwo, J.; Hong, M.; Caymax, Matty; Heyns, Marc

ISSN

0003-6951

Issue

4

Journal

Applied Physics Letters

Volume

99

Title

Low interfacial trap density and sub-nm equivalent oxide thickness in In0.53Ga0.47As (001) metal-oxide-semiconductor devices using molecular beam deposited HfO2/Al2O3 as gate dielectrics

Publication type

Journal article