Authors

Croes, Kristof; Demuynck, Steven; Siew, Yong Kong; Wilson, Chris; Heylen, Nancy; Beyer, Gerald; Tokei, Zsolt

Conference

IEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM

Title

Reliability performance of advanced metallization options for 30nm ½ pitch in SiCOH low-k materials

Publication type

Proceedings paper

Embargo date

9999-12-31