Publication:
Reliability performance of advanced metallization options for 30nm ½ pitch in SiCOH low-k materials
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1903 since deposited on 2021-10-19
1last month
Acq. date: 2026-09-20
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Views
1903 since deposited on 2021-10-19
1last month
Acq. date: 2026-09-20
Citations