Authors

De Dobbelaere, C.; Calzada, M.L.; Jimenez, R.; Ricote, J.; Bretos, I.; Mullens, J.; Hardy, An; Van Bael, Marlies

ISSN

0002-7863

Issue

33

Journal

Journal of the American Chemical Society

Volume

133

Title

Aqueous solutions for low-temperature photoannealing of functional oxide films: reaching the 400 degrees C Si-technology integration barrier

Publication type

Journal article