Authors

de Souza, M.; Pavanello, M.A.; Martino, J.A.; Simoen, Eddy; Claeys, Cor

Conference

26th Symposium on Microelectronics Technology and Devices - SBMicro

Title

Impact of substrate rotation and temperature on the mobility and series resistance of triple-gate SOI nMOSFETs

Publication type

Proceedings paper