Authors

Finders, Jo; Ronse, Kurt; Van den hove, Luc; Van Driessche, Veerle; Tzviatkov, Plamen

Conference

Proceedings Interface '97 Microlithography Symposium

Title

Impact of SEM accuracy on the CD control during gate patterning process of 0.25μm and sub-0.25μm generations

Publication type

Proceedings paper