Optimizing i-line lithography for 0.3-μm poly-gate manufacturing

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Authors

Finders, Jo; Tzviatkov, Plamen; Ronse, Kurt; Van den hove, Luc

Issue

March

Journal

Solid State Technology

Volume

40

Title

Optimizing i-line lithography for 0.3-μm poly-gate manufacturing

Publication type

Journal article

Embargo date

9999-12-31

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