Authors

Eyben, Pierre; Clarysse, Trudo; Mody, Jay; Nazir, Aftab; Schulze, Andreas; Hantschel, Thomas; Vandervorst, Wilfried

Conference

International Conference on Ultimate Integration on Silicon - ULIS

Title

Two-dimensional carrier mapping at the nanometer-scale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy

Publication type

Proceedings paper

Embargo date

9999-12-31